Innovate to AcceleratePPPL collaborates with the semiconductor industry, academic institutions and the Department of Energy lab complex to develop better ways to make next-generation materials and manufacturing processes for computer chips, memory, and sensors. The Lab’s expertise in low-temperature plasmas, which are used in nearly half of all semiconductor fabrication steps, is transforming a trial-and-error approach into one based on science. Meet the Team Barry P Rand Head of Microelectronics Yevgeny Raitses Managing Principal Research Physicist Alastair Stacey Head of Quantum Materials and Devices Igor Kaganovich Principal Research Physicist David Graves PPPL Associated Faculty Nathalie de Leon PPPL Associated Faculty Our Partners We're partnering with Lam Research to simulate a key step in atomic-scale chip fabrication, an increasingly critical process that aims to remove single atomic layers from silicon surfaces, one at a time. Our partnership with Samsung has focused on the etching of computer logic and memory patterns on microscopically thin layers of chips — key applications of plasma in chip fabrication. For Applied Materials, we're developing new plasma diagnostics and modeling tools for key processing steps such as atomic-scale etching in microchip manufacturing. Leading Microelectronics R&D Semiconductors are the foundation of the memory, storage and processing power used in commercial, industrial and military-grade devices. Nearly every aspect of U.S. society is tied to semiconductors. At PPPL, we’re answering critical research questions about semiconductors so the U.S. can continue to lead the world in electronics.We develop fast simulations of complex plasma reactors, advanced systems for measuring chemicals inside reactors and highly complex chemical models of semiconductor manufacturing processes. We are also developing innovative methods for growing diamond material used for microelectronics. We’re answering critical questions. How can we better create and control plasma to create chips with smaller features?Using PPPL’s expertise in plasma, the Lab can contribute to a deeper understanding of nearly every stage of the manufacturing process. What are the atomic-level interactions between plasmas and semiconductor surfaces?By combining our physics and quantum chemistry knowledge, PPPL develops simulations of semiconductor manufacturing processes, including digital twins. Is there something better than silicon for semiconductor manufacturing?Our research into new materials like transition metal dichalcogenides, or TMD, holds promise for overcoming the limitations of silicon. Featured ProjectsThe U.S. DOE has awarded PPPL two highly competitive Microelectronics Science Research Center projects. These collaborative projects bring together national labs, as well as academic and industry partners. Each award will provide $3 million per year and is expected to run for four years. The DOE program leading to these awards originated from the CHIPS and Science Act of 2022. Plasma-enabled 2D materials for energy‑efficient microelectronicsWe’re investigating ways to make smaller, more capable microelectronics with two-dimensional (2D) materials that are made using plasmas in high-temperature chambers. Principal Investigator / DirectorYevgeny Raitses, PPPL Co-Principal Investigator / Co-DirectorBarry P. Rand, Head of Microelectronics Co-Principal InvestigatorsIgor Kaganovich, PPPL, Project Thrust LeadDavid Graves, PPPL and Princeton University, Project Thrust LeadAlice Kunin, Princeton UniversitySaien Xie, Princeton University, Project Thrust LeadJane Chang, University of California, Los AngelesVincent Donnelly, University of HoustonMark Kushner, University of MichiganEric Joseph, IBMRobert L. Bruce, IBMLuxherta Buzi, IBM Nanoscale devices and extreme environmentsWe’re looking at the extreme properties of diamond material and how it can be used to make sensors and electronics that can handle harsh environments, such as the inside of nuclear reactor or a thruster. Principal Investigator / DirectorAlastair Stacey, PPPL and RMIT Deputy DirectorDavid Graves, PPPL and Princeton University Co-Principal InvestigatorsNathalie de Leon, Princeton UniversityAditya Sood, Princeton UniversityMaria Gatu Johnson, Massachusetts Institute of TechnologyHarris Kagan, Ohio State UniversityYongjie Hu, University of California, Los AngelesJim Davidson, FemtoSci Recent News PPPL leading two CHIPS and Science Act projects Dec. 23, 2024 Detecting defects in tomorrow’s technology: New research enhances our understanding of a likely candidate for next-generation computer chips July 9, 2024 How black silicon, a prized material used in solar cells, gets its dark, rough edge Jan. 9, 2024 View All Related links Applied Materials and Sustainability Sciences
