A Collaborative National Center for Fusion & Plasma Research

“A Novel Objective for EUV Microscopy and EUV Lithography” Inventors ..--.. Manfred Bitter, Kenneth Hill, Philip Efthimion.

This invention is a new x-ray scheme for stigmatic imaging. The scheme consists of one convex spherically bent crystal and one concave spherically bent crystal. The radii of curvature and Bragg reflecting lattice planes of the two crystals are properly matched to eliminate the astigmatism, so that the conditions for stigmatic imaging are met for a particular wavelength. The magnification is adjustable and solely a function of the two Bragg angles or angles of incidence. Although the choice of Bragg angles is constrained by the availability of crystals, this is not a severe limitation for the imaging of plasmas, since a particular wavelength can be selected from the bremsstrahlung continuum. The working principle of this imaging scheme has been verified with visible light. Further tests with x rays are planned for the near future. 


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