A Collaborative National Center for Fusion & Plasma Research

A Magnetically Controlled Plasma Source Inventor Yevgeny Raitses

This invention is a multipurpose and highly versatile plasma source that uses applied electric and magnetic fields to produce a spatially stratified population of hot and cold electrons. This unique feature can be used for a highly controllable source of a high flux of positive and negative ions and energetic neutral particles for use in the semiconductor industry, as well as for ion and neutral beams.


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